JPH0432005U - - Google Patents

Info

Publication number
JPH0432005U
JPH0432005U JP7458690U JP7458690U JPH0432005U JP H0432005 U JPH0432005 U JP H0432005U JP 7458690 U JP7458690 U JP 7458690U JP 7458690 U JP7458690 U JP 7458690U JP H0432005 U JPH0432005 U JP H0432005U
Authority
JP
Japan
Prior art keywords
positioning
interferometer
section
optical element
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7458690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7458690U priority Critical patent/JPH0432005U/ja
Publication of JPH0432005U publication Critical patent/JPH0432005U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP7458690U 1990-07-13 1990-07-13 Pending JPH0432005U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7458690U JPH0432005U (en]) 1990-07-13 1990-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7458690U JPH0432005U (en]) 1990-07-13 1990-07-13

Publications (1)

Publication Number Publication Date
JPH0432005U true JPH0432005U (en]) 1992-03-16

Family

ID=31614406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7458690U Pending JPH0432005U (en]) 1990-07-13 1990-07-13

Country Status (1)

Country Link
JP (1) JPH0432005U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010216894A (ja) * 2009-03-13 2010-09-30 Olympus Corp 干渉計
JP2015075452A (ja) * 2013-10-11 2015-04-20 大塚電子株式会社 形状測定装置及び形状測定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010216894A (ja) * 2009-03-13 2010-09-30 Olympus Corp 干渉計
JP2015075452A (ja) * 2013-10-11 2015-04-20 大塚電子株式会社 形状測定装置及び形状測定方法
KR20150042713A (ko) * 2013-10-11 2015-04-21 오츠카 일렉트로닉스 가부시키가이샤 형상 측정 장치 및 형상 측정 방법

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